Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System-Reference-Cited by-同舟云学术

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Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System

Published:2021-01-25 Issue:3 Volume:6 Page:2000831
ISSN:2365-709X
Container-title:Advanced Materials Technologies
language:en
Short-container-title:Adv. Mater. Technol.

Author:

Jolly Claire¹,Gomez Andres²,Sánchez‐Fuentes David¹,Cakiroglu Dilek¹,Rathar Raïssa¹,Maurin Nicolas¹,Garcia‐Bermejo Ricardo¹,Charlot Benoit¹,Gich Martí²,Bahriz Michael¹,Picas Laura³,Carretero‐Genevrier Adrian¹^ORCID

Affiliation:

1. Institut d'Electronique et des Systèmes (IES) CNRS Université de Montpellier 860 Rue de Saint Priest Montpellier 34095 France

2. Institut de Ciència de Materials de Barcelona ICMAB Consejo Superior de Investigaciones Científicas CSIC Campus UAB Bellaterra Catalonia 08193 Spain

3. Institut de Recherche en Infectiologie de Montpellier (IRIM) CNRS UMR 9004–Université de Montpellier Montpellier 34293 France

Funder

European Research Council

Centre National de la Recherche Scientifique

Publisher

Wiley

Subject

Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/admt.202000831

Reference24 articles.

1. Epitaxial piezoelectric MEMS on silicon

2. Piezoelectric MEMS based acoustic sensors: A review

3. Mechanical and optical nanodevices in single-crystal quartz

4. Quartz: a material for microdevices

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Application of piezoelectric quartz for self-cleaning membrane preparation;Ceramics International;2022-06

2. Thin films of the $$\alpha$$-quartz $$Si_xGe_{1-x}O_2$$ solid solution;Scientific Reports;2022-02-07

3. Metal-Induced Crystallization in Metal Oxides;Accounts of Chemical Research;2022-01-03

4. Growth and Crystallization of SiO2/GeO2 Thin Films on Si(100) Substrates;Nanomaterials;2021-06-23

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