Author:
Kozicki M. N.,Dinnis A. R.,Robertson J. M.
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference10 articles.
1. Determination of kilovolt electron energy dissipation vs penetration distance in solid materials;Everhart;J Appl Phys,1971
2. Gibbons J F Beam recrystallised polysilicon-films for integrated circuit applications 1981 431 440
3. Electron beam annealing of implanted diodes and polysilicon layers;Krimmel;Proc Electrochem Soc,1980
4. Estimation of temperature rise in electron beam heating of thin films;Lin;IBM J Res Devel,1967
5. An electron beam method of measuring resistivity distribution in semiconductors;Munakata;Jap J Appl Phys,1967
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献