Electron beam induced voltage and injected charge modes of testing-Reference-Cited by-同舟云学术

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Electron beam induced voltage and injected charge modes of testing

Published:1983 Issue:2 Volume:5 Page:53-70
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Lukianoff G. V.,Langner G. O.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Reference19 articles.

1. Chang T H P Hohn F J Coane P J Kern D P Electron beam testing of packaging modules for VLSI chip arrays 1981

2. Engelke H Contactless short/open test method using two electron beams 1974

3. Contactless probing of hybrid substrates;Gill;The Int J of Hybrid Microelectr,1979

4. IEEEJ;Könemann;Solid State Circuits,1980

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