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Fundamentals of electron beam testing of integrated circuits

  • Published:1983 Issue:3 Volume:5 Page:103-122
  • ISSN:0161-0457
  • Container-title:Scanning
  • language:en
  • Short-container-title:Scanning

Author:

Menzel E.,Kubalek E.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Reference83 articles.

1. Voltage measurement in the scanning electron microscope;Wells;J Phys E,1968

2. Plows G S Stroboscopic scanning electron microscopy and the observation of microcircuit surface voltage 1969

3. A technique for linearization of voltage contrast in the scanning electron microscope;Gopinath;J Phys E,1971

4. Hannah J M Scanning electron microscope applications to integrated circuits testing 1974

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