Radiation damage processes affecting electron beam lithography of inorganic materials
Author:
Funder
Department of Energy, Office of Basic Energy Sciences
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.4950140205/fullpdf
Reference38 articles.
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