The use of scanning electron microscopy to quantify the burden of particles released from clean-room wiping materials-Reference-Cited by-同舟云学术

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The use of scanning electron microscopy to quantify the burden of particles released from clean-room wiping materials

Published:1993 Issue:5 Volume:15 Page:301-308
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Bhattacharjee Himansu R.,Paley Steven J.,Pavlik Thomas J.,Atterbury Osmond

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.4950150510/fullpdf

Reference13 articles.

1. Hango R DI water quality monitoring for very dense electronic component manufacturing 1988

2. Knollenberg RG Proc IES 1986 501 511

3. Knollenberg RG Veal DL J IES 64 81 1992

4. Assessing Wiping Materials for their Potential to Contribute Particles to Clean Environments: A Novel Approach

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characteristics of Wipers and Swabs for Pharmaceutical Applications;Journal of the IEST;2000-12-14

2. Shape Factors of ISO 12103-A3 (Medium Test Dust);Filtration + Separation;2000-11

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