Ion damage to the specimen in the SEM studied by the EBIC technique
Author:
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference24 articles.
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3. Negative ion emission from oxide coated filaments;Barton;Phys Rev,1925
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1. Electron Scattering and Diffusion;Springer Series in Optical Sciences;1998
2. Foundations of Environmental Scanning Electron Microscopy;Advances in Electronics and Electron Physics Volume 71;1988
3. Electron Scattering and Diffusion;Scanning Electron Microscopy;1985
4. Charge collection scanning electron microscopy;Journal of Applied Physics;1982-06
5. Observation of dislocations and microplasma sites in semiconductors by direct correlations of STEBIC, STEM and ELS;Journal of Microscopy;1980-03
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