Fast, contactless and spatially resolved measurement of sheet resistance by an infrared method

Author:

Isenberg Joerg,Biro Daniel,Warta Wilhelm

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. A method of measuring earth resistivity

2. Resistivity Measurements on Germanium for Transistors

3. Semiconductor Material and Device Characterization. Wiley: New York, 1990.

4. Nondestructive and contactless sheet resistance and junction depth measurements by infrared transmission through the diffusion. Proceedings of be Spring?Meeting to be Electrochemical Society on Semiconductor Silicon, Chicago, 13-18 May 1973; 596.

5. Free carrier absorption in silicon

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