1. National Key Laboratory of Advanced Micro and Nano Manufacture Technology School of Integrated Circuits Peking University Beijing 100871 China
2. Beijing Advanced Innovation Center for Integrated Circuits Beijing 100871 China
3. Academy for Advanced Interdisciplinary Studies and Center for Nanochemistry Beijing Science and Engineering Center for Nanocarbons Peking University Beijing 100871 China
4. Beijing Graphene Institute Beijing 100095 China