1. State Key Laboratory of Materials for Integrated Circuits Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China
2. University of Chinese Academy of Sciences Beijing 100049 China
3. State Key Laboratory of Surface Physics and Department of Physics Institute for Nanoelectronic Devices and Quantum Computing Fudan University Shanghai 200433 China
4. Westlake Institute for Optoelectronics Hangzhou 310024 China
5. Department of Physics Department of Materials Science and Engineering and Department of Biomedical Engineering City University of Hong Kong Tat Chee Avenue Kowloon Hong Kong 999077 China
6. Department of Materials Science Fudan University Shanghai 200433 China