Flexible Optoelectronic Multimodal Proximity/Pressure/Temperature Sensors with Low Signal Interference

Abstract

AbstractMultimodal tactile sensors are a crucial part of intelligent human‐machine interaction and collaboration. Simultaneous detection of proximity, pressure, and temperature on a single sensor can greatly promote the safety, interactivity, and compactness of interaction systems. However, severe signal interference and complex decoupling algorithms hinder the actual applications. Here, this work reports a flexible optoelectronic multimodal sensor capable of detecting and decoupling proximity/pressure/temperature by integrating a light waveguide and an interdigital electrode (IDE) into a compact fibrous sensor. Negligible signal interference is realized by combining heterogeneous sensing mechanisms of optics and electronics, which encodes proximity into capacitance, pressure into light intensity and temperature into resistance. The sensor exhibits a large sensing distance of 225 mm with fast responses for proximity detection, a pressure sensitivity of 0.42 N−1, and a temperature sensitivity of 7% °C−1. As a proof of concept, a doll equipped with the sensor can accurately discriminate and detect various stimuli, thus achieving safe and immersive interactions with the user. This work opens up promising paths for self‐decoupled multimodal sensors and related human/machine/environment interaction applications.