1. Institute of Materials Research Tsinghua Shenzhen International Graduate School Tsinghua University Shenzhen 518055 P. R. China
2. Shenzhen Institute of Advanced Electronic Materials‐Shenzhen Fundamental Research Institutions Shenzhen Institute of Advanced Technology Chinese Academy of Sciences Shenzhen 518055 P. R. China
3. Institute of Semiconductor Manufacturing Research Shenzhen University Shenzhen Guangdong 518060 P. R. China
4. School of Materials Science and Engineering Georgia Institute of Technology Atlanta GA 30332 USA