Large‐Area Uniform 1‐nm‐Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A “Next‐Generation” Cu Diffusion Barrier?-Reference-Cited by-同舟云学术

Large‐Area Uniform 1‐nm‐Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A “Next‐Generation” Cu Diffusion Barrier?

Published:2022-02-25 Issue:15 Volume:34 Page:2110454
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Advanced Materials

Author:

Kang Yun‐Ho¹,Lee Sangbong²,Choi Youngwoo³,Seong Won Kyung⁴,Han Kyu Hyo¹,Kim Jang Hwan¹,Kim Hyun‐Mi⁵,Hong Seungbum³,Lee Sun Hwa⁴,Ruoff Rodney S.⁴⁶⁷⁸,Kim Ki‐Bum²,Kim Sang Ouk¹^ORCID

Affiliation:

1. National Creative Research Initiative Center for Multi‐Dimensional Directed Nanoscale Assembly Department of Materials Science and Engineering Korea Advance Institute of Science and Technology (KAIST) Daejeon 34141 Korea

2. Research Institute of Advanced Materials Department of Materials Science and Engineering Seoul National University Seoul 08826 Korea

3. Department of Materials Science and Engineering Korea Advance Institute of Science and Technology (KAIST) Daejeon 34141 Korea

4. Center for Multidimensional Carbon Materials (CMCM) Institute for Basic Science (IBS) Ulsan 44919 Korea

5. Korea Electronics Technology Institute (KETI) Gyeonggi 13509 Korea

6. Department of Chemistry Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Korea

7. Department of Materials Science and Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Korea

8. School of Energy and Chemical Engineering Ulsan National Institute of Science and Technology (UNIST) Ulsan 44919 Korea

Funder

National Research Foundation of Korea

Institute for Basic Science

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adma.202110454

Reference90 articles.

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