1. Center for Integrated Quantum Information Technologies (IQIT) School of Physics and Astronomy and State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Jiao Tong University Shanghai 200240 China
2. Hefei National Laboratory Hefei 230088 China
3. National Laboratory of Solid State Microstructures and School of Physics, Collaborative Innovation Center of Advanced Microstructures Nanjing University Nanjing 210093 China
4. TuringQ Co., Ltd. Shanghai 200240 China
5. Chip Hub for Integrated Photonics Xplore (CHIPX) Shanghai Jiao Tong University Wuxi 214000 China