Fabricating 3D Metastructures by Simultaneous Modulation of Flexible Resist Stencils and Basal Molds-Reference-Cited by-同舟云学术

Fabricating 3D Metastructures by Simultaneous Modulation of Flexible Resist Stencils and Basal Molds

Published:2020-07-26 Issue: Volume: Page:2002570
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Cai Hongbing¹²³,Meng Qiushi¹³,Chen Qiang¹³,Ding Huaiyi¹,Dai Yanmeng⁴,Li Sijia¹,Chen Disheng²,Tan Qinghai²,Pan Nan¹,Zeng Changgan¹⁵,Qi Zeming⁶,Liu Gang⁶,Tian Yangchao⁶,Gao Weibo²,Wang Xiaoping¹³^ORCID

Affiliation:

1. Hefei National Laboratory for Physical Sciences at the Microscale and Synergetic Innovation Center of Quantum Information & Quantum PhysicsUniversity of Science and Technology of China Hefei Anhui 230026 China

2. Division of Physics and Applied PhysicsSchool of Physical and Mathematical SciencesNanyang Technological University Singapore 637371 Singapore

3. USTC Center for Micro‐ and Nanoscale Research and FabricationUniversity of Science and Technology of China Hefei Anhui 230026 China

4. Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong ProvinceCollege of Optoelectronic EngineeringShenzhen University Shenzhen 518060 China

5. Department of PhysicsUniversity of Science & Technology of China Hefei Anhui 230027 China

6. National Synchrotron Radiation LaboratoryUniversity of Science & Technology of China Hefei Anhui 230027 China

Funder

Ministry of Science and Technology of the People's Republic of China

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adma.202002570