1. Key Laboratory of Microelectronics Device & Integrated Technology Institute of Microelectronics of Chinese Academy of Sciences Beijing 100029 China
2. University of Chinese Academy of Sciences Beijing 100049 China
3. Frontier Institute of Chip and System Fudan University Shanghai 200433 China
4. Shanghai Qi Zhi Institute Shanghai 200232 China
5. Zhangjiang Fudan International Innovation Center Fudan University Shanghai 200433 China