Microlenses arrays: Fabrication, materials, and applications
Author:
Affiliation:
1. School of Electromechanical and Automotive Engineering Yantai University Yantai China
2. State Key Laboratory of Robotics, Shenyang Institute of Automation Chinese Academy of Sciences Shenyang China
Funder
Natural Science Foundation of Shandong Province
National Natural Science Foundation of China
Publisher
Wiley
Subject
Medical Laboratory Technology,Instrumentation,Histology,Anatomy
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/jemt.23818
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1. Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques
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5. Design and fabrication of an electrohydrodynamically actuated microlens with areal density modulated electrodes
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