1. Institute of Microsystem Technology (IMTEK) Laboratory for Biomedical Microtechnology Georges‐Koehler‐Allee 102 D‐79110 Freiburg Germany
2. Cluster of Excellence BrainLinks‐BrainTools Georges‐Koehler‐Allee 80 79110 Freiburg Germany
3. MEMS Research Laboratory Department of Mechanical Engineering College of Engineering San Diego State University 5500 Campanile Drive San Diego CA 92182‐1323 USA
4. Center for Sensorimotor Neural Engineering (CSNE) Box 37, 1414 NE 42nd St., Suite 204 Seattle WA 98105–6271 USA
5. Center for Translational Neurophysiology of Speech and Communication Istituto Italiano di Tecnologia Via Fossato di Mortara 17/19 44121 Ferrara Italy
6. Section of Human Physiology University of Ferrara Via Fossato di Mortara 17/19 44121 Ferrara Italy