Replications and analysis of microlens array fabricated by a modified LIGA process-Reference-Cited by-同舟云学术

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Replications and analysis of microlens array fabricated by a modified LIGA process

Published:2006 Issue:4 Volume:46 Page:416-425
ISSN:0032-3888
Container-title:Polymer Engineering & Science
language:en
Short-container-title:Polym. Eng. Sci.

Author:

Kim Dong Sung,Lee Hyun Sup,Lee Bong-Kee,Yang Sang Sik,Kwon Tai Hun,Lee Seung S.

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,General Chemistry,Materials Chemistry,Polymers and Plastics,General Chemistry

Reference21 articles.

1. Micromachined Transducers Sourcebook, McGraw-Hill, New York (1998).

2. Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

3. Fabrication and characterization of microlenses realized by a modified LIGA process

4. Technique for monolithic fabrication of microlens arrays

5. The manufacture of microlenses by melting photoresist

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