Affiliation:
1. Key Laboratory of MEMS of the Ministry of Education Southeast University Nanjing China
Funder
National Basic Research Program of China
Subject
Electrical and Electronic Engineering,Computer Science Applications,Modelling and Simulation
Reference27 articles.
1. Review of Electrothermal Actuators and Applications
2. Fabrication and investigation of low actuation voltage curved beam bistable MEMS switch;Joshitha C;Microsyst Technol.,2017
3. Design and characterization of a low temperature gradient and large displacement thermal actuators for in situ mechanical testing of nanoscale materials;Abbas K;J Micromech Microeng,2012
4. SinclairMJ.A high force low area MEMS thermal actuator. Paper presented at: ITHERM 2000. The Seventh Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.00CH37069); May 23‐26 2000; Las Vegas NV.
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