Wafer yield prediction using derived spatial variables
Author:
Affiliation:
1. Department of Industrial Engineering; Tsinghua University; Beijing China
2. Department of Industrial Systems Engineering and Management; National University of Singapore; Singapore
Funder
National Natural Science Foundation of China
Publisher
Wiley
Subject
Management Science and Operations Research,Safety, Risk, Reliability and Quality
Reference37 articles.
1. A dual burn-in policy for defect-tolerant memory products using the number of repairs as a quality indicator;Tong;Microelectron Reliab,2008
2. Development of a dual burn-in policy for semiconductor products based on the number of defective neighborhood chips;Tong;Int J Reliab Qual Saf Eng,2006
3. Mirza AI O'Donoghue G Drake AW Graves SC Spatial yield modeling for semiconductor wafers Cambridge, Massachusetts, USA 1995 276 281
4. Monitoring wafer map data from integrated circuit fabrication processes for spatially clustered defects;Hansen;Technometrics,1997
5. Statistical methods for visual defect metrology;Cunningham;IEEE Trans Semicond Manuf,1998
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