Residue analysis of thermally depolymerized phthalaldehyde‐based polymer thin films
Author:
Affiliation:
1. School of Chemical and Biomolecular Engineering Georgia Institute of Technology Atlanta Georgia USA
Funder
Lam Research Corporation
Publisher
Wiley
Subject
Polymers and Plastics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/pat.5244
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