Affiliation:
1. Semiconductor Energy Laboratory Co., Ltd. Kanagawa Japan
2. Semiconductor Energy Laboratory Co., Ltd. Tochigi Japan
Abstract
We developed a patterning technology via photolithography
that does not use a fine metal mask to achieve high resolution
for all RGB pixels. An 8.3‐inch 1058‐ppi organic light‐
emitting diode (OLED) display was prototyped using the
technology for an oxide semiconductor backplane over a
glass substrate. Having no restriction on alignment accuracy,
metal mask washing, running costs, etc. in the
manufacturing process of medium‐ or large‐sized OLED
displays, this technology holds promise for enabling the mass
production.
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献