Depth profiling on a sputtered bevel of sub-degree slope angle-Reference-Cited by-同舟云学术

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Depth profiling on a sputtered bevel of sub-degree slope angle

Published:1985-02 Issue:1 Volume:7 Page:29-34
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Gries W. H.

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference13 articles.

1. Crater‐edge profiling in interface analysis employing ion‐beam etching and AES

2. Crater edge profling of Ni/Cr sandwich multilayer thin films by scanning Auger microscopy (sam)

3. and Proceedings of 3rd International Conference on Solid Surfaces, Vienna (Austria), 1977, p. 2297.

4. and Proceedings of International Conference on Ion Beam Modification of Materials, Budapest (Hungary), 1978, p. 1743.

5. private communication.

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low temperature plasma for the preparation of crater walls for compositional depth profiling of thin inorganic multilayers;Surface and Interface Analysis;2016-10-17

2. References;Secondary Ion Mass Spectrometry;2014-08-22

3. Secondary Ion Mass Spectrometry;2014-08-18

4. Practice of Surface and Interface Analysis with AES and XPS;Springer Series in Surface Sciences;2012-06-01

5. Quantitative Compositional Depth Profiling;Springer Series in Surface Sciences;2012-06-01

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