Results of a Ta2O5 sputter yield round robin
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference7 articles.
1. Sputtering Experiments with 1‐ to 5‐keV Ar+ Ions
2. Atomic and Ionic Impact Phenomena on Metal Surfaces. Academic Press, London (1965). See also
3. and Ion Bombardment of Solids. Heinemann, London (1968).
4. The determination of the thickness, dielectric constant, and other properties of anodic oxide films on tantalum from the interference colours
5. The kinetics of formation and structure of anodic oxide films on tantalum
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