Depth profiling by SIMS?depth resolution, dynamic range and sensitivity-Reference-Cited by-同舟云学术

Depth profiling by SIMS?depth resolution, dynamic range and sensitivity

Published:1982-04 Issue:2 Volume:4 Page:35-41
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Magee C. W.,Honig R. E.

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference35 articles.

1. Recent studies ( and unpublished) have shown that liquids may also be sputtered to yield SIMS spectra.

2. Depth profiling by secondary ion mass spectrometry

3. Quantitative depth profiling in surface analysis: A review

4. Proceedings of the International Workshop on Ion Implantation. Laser Treatment and Ion Beam Analysis of Materials, Bombay, India, 9-13 February, 1981, Radiat. Eff., in press.

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