Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars-Reference-Cited by-同舟云学术

Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

Published:2016-10-06 Issue:1 Volume:13 Page:1601753
ISSN:1613-6810
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language:en
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Author:

Wang Yue-Cun¹,Tian Lin¹,Liu Fan²,Qin Yuan-Bin¹,Zheng Gong³,Wang Jing-Tao²,Ma Evan¹⁴,Shan Zhi-Wei¹

Affiliation:

1. Center for Advancing Materials Performance from the Nanoscale; State Key Laboratory for Mechanical Behavior of Materials; Xi'an Jiaotong University; Xi'an 710049 P. R. China

2. School of Materials Science and Engineering; Nanjing University of Science and Technology; Nanjing 210094 P. R. China

3. Engineering Research Center of Materials Behavior and Design; Ministry of Education; Nanjing University of Science and Technology; Nanjing 210094 P. R. China

4. Department of Materials Science and Engineering; Johns Hopkins University; Baltimore MD 21218 USA

Funder

National Natural Science Foundation of China

Publisher

Wiley

Subject

Biomaterials,Biotechnology,General Materials Science,General Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/smll.201601753/fullpdf

Reference38 articles.

1. Split-ball resonator as a three-dimensional analogue of planar split-rings

2. Unlocking new contrast in a scanning helium microscope