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Highly Porous Silicon Membranes Fabricated from Silicon Nitride/Silicon Stacks

  • Published:2014-03-13 Issue:14 Volume:10 Page:2946-2953
  • ISSN:1613-6810
  • Container-title:Small
  • language:en
  • Short-container-title:Small

Author:

Qi Chengzhu12,Striemer Christopher C.34,Gaborski Thomas R.54,McGrath James L.6,Fauchet Philippe M.13

Affiliation:

1. Department of Electrical Engineering and Computer Science; Vanderbilt University; Nashville TN 37235 United States

2. Materials Science Program, University of Rochester; Rochester NY 14627 United States

3. Department of Electrical and Computer Engineering; University of Rochester; Rochester NY 14627 United States

4. SiMPore Inc., West Henrietta; New York 14586 United States

5. Department of Chemical and Biomedical Engineering; Rochester Institute of Technology; Rochester NY 14623 United States

6. Department of Biomedical Engineering; University of Rochester; Rochester NY 14627 United States

Publisher

Wiley

Subject

Biomaterials,Biotechnology,General Materials Science,General Chemistry

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