Correlation between the Carbon Nanotube Growth Rate and Byproducts in Antenna‐Type Remote Plasma Chemical Vapor Deposition Observed by Vacuum Ultraviolet Absorption Spectroscopy-Reference-Cited by-同舟云学术

Correlation between the Carbon Nanotube Growth Rate and Byproducts in Antenna‐Type Remote Plasma Chemical Vapor Deposition Observed by Vacuum Ultraviolet Absorption Spectroscopy

Published:2019-07-26 Issue:48 Volume:15 Page:1901504
ISSN:1613-6810
Container-title:Small
language:en
Short-container-title:Small

Author:

Inaba Masafumi¹²^ORCID,Ochiai Takumi¹,Ohara Kazuyoshi¹,Kato Ryogo¹,Maki Tasuku¹,Ohashi Toshiyuki¹,Kawarada Hiroshi¹²³^ORCID

Affiliation:

1. Graduate School of Advanced Science and EngineeringWaseda University 3‐4‐1 Okubo, Shinjuku Tokyo 169‐8555 Japan

2. Institute of Materials and Systems for SustainabilityNagoya University Furo‐cho, Chikusa Nagoya 464‐8603 Japan

3. The Kagami Memorial Laboratory for Materials Science and TechnologyWaseda University 2‐8‐26 Nishiwaseda, Shinjuku Tokyo 169‐0051 Japan

Funder

Japan Society for the Promotion of Science

Publisher

Wiley

Subject

Biomaterials,Biotechnology,General Materials Science,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/smll.201901504

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