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Selective functionalization of silicon surface controlled by metastable helium atom beam for patterning chemisorbed monolayer molecular assemblies

  • Published:2014-07-10 Issue:12-13 Volume:46 Page:1196-1199
  • ISSN:0142-2421
  • Container-title:Surface and Interface Analysis
  • language:en
  • Short-container-title:Surf. Interface Anal.

Author:

Wang Z. P.12,Zhang J. W.32,Zhang Z. M.1,Ding Z. J.3,Yamauchi Y.2

Affiliation:

1. Center for Physics Experiments; University of Science and Technology of China; Hefei Anhui 230026 China

2. National Institute for Materials Science; Ibaraki 305-0047 Japan

3. Department of Physics; University of Science and Technology of China; Hefei Anhui 230026 China

Funder

National Natural Science Foundation of China

Ministry of Education of China

Fundamental Research Funds for the Central Universities

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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