Practical Source/Drain Diffusion and Body Doping Layouts for High-Performance and Low-Energy Triple-Gate SOI MOSFETs

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John Wiley & Sons Singapore Pte. Ltd

Reference16 articles.

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4. H. Kam L. Chang T.-J. King Impact of 3D Source-Drain Doping Profiles and Contact Schemes on FinFET Performance in the Nanoscale Regime 9 10 2004

5. A. Dixit K. G. Anil R. Rooyackers F. Leys M. Kaiser R. Weemaes I. Ferain A. De Keersgieter N. Collaert R. Surdeanu M. Goodwin P. Zimmerman R. Loo M. Caymax M. Jurezak S. Biesemans K. De Meyer Minimization of the MuGFET Contact Resistance by Integration of NiSi Contacts on Epitaxially Raised Source/Drain Regions 443 446 2005

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