1. Forschungszentrum Jülich GmbH, Helmholtz‐Institute Erlangen‐Nürnberg for Renewable Energy (IEK‐11) Erlangen Germany
2. Department of Chemical and Biological Engineering Friedrich‐Alexander‐Universität Erlangen‐Nürnberg Erlangen Germany
3. Laboratory for MEMS Applications, IMTEK Department of Microsystems Engineering University of Freiburg Freiburg Germany