Affiliation:
1. Development of X‐ray Components Helmut Fischer GmbH Institut für Elektronik und Messtechnik Berlin Germany
Abstract
AbstractThis article presents recent investigations of newly developed magnifying capillary optics used for full‐field x‐ray spectroscopy. The new cone‐shaped capillary optics reached spatial resolutions of 2.4 μm and increased the magnification factor to 40. These parameters have been evaluated by a confocal full‐field XRF (CFF‐XRF) and a full‐field XRF (FF‐XRF) setup, depicted in this article.