Spectroscopic ellipsometry of SU‐8 photoresist from 190 to 1680 nm (0.740

Spectroscopic ellipsometry of SU‐8 photoresist from 190 to 1680 nm (0.740–6.50 eV)

Published:2020-10-14 Issue:1 Volume:53 Page:5-13
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf Interface Anal

Author:

Major George H.¹,Chapman Sean C.¹,Chapman Jeffrey T.¹,Wheeler Joshua I.¹,Chatterjee Shiladitya¹,Cushman Cody V.¹,Ess Daniel H.¹,Linford Matthew R.¹^ORCID

Affiliation:

1. Department of Chemistry and Biochemistry Brigham Young University Provo Utah USA

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/sia.6867

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4. Single-mode TE00–TM00 optical waveguides on SU-8 polymer

5. Micro flow cytometers with buried SU‐8/SOG optical waveguides;Lee G‐B;Sensors Actuators a: Phys,2003

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