Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide-Reference-Cited by-同舟云学术

Ultra-thin 3D Nano-Devices from Atomic Layer Deposition on Polyimide

Published:2014-04-01 Issue:23 Volume:26 Page:3962-3967
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Eigenfeld Nathan T.¹,Gray Jason M.¹,Brown Joseph J.¹,Skidmore George D.²,George Steven M.³,Bright Victor M.¹

Affiliation:

1. Department of Mechanical Engineering; University of Colorado at Boulder; 1111 Engineering Drive, 427 UCB Boulder CO 80309-0427 USA

2. Network and Imaging Systems DRS ITS Texas Site; 13532 North Central Expwy SC Bldg Dallas TX 75243 USA

3. Department of Chemistry and Biochemistry and Department of Mechanical Engineering; University of Colorado at Boulder; 215 UCB Boulder CO 80309-0215 USA

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference44 articles.

1. Polysilicon: a versatile material for microsystems

2. Silicon as a mechanical material

3. Recent Developments in Polymer MEMS

4. Stretchable Magnetoelectronics

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atomic layer deposition in the design of functional materials for sensing/removing toxic gases;Current Opinion in Environmental Science & Health;2023-12

2. Bayesian Machine Learning for Efficient Minimization of Defects in ALD Passivation Layers;ACS Applied Materials & Interfaces;2021-11-04

3. Development and application of vapor deposition technology in atomic manufacturing;Acta Physica Sinica;2021

4. Nanoscale Self-Assembly Using Ion and Electron Beam Techniques: A Rapid Review;MRS Advances;2020-12

5. Bidirectional Self-Folding with Atomic Layer Deposition Nanofilms for Microscale Origami;Nano Letters;2020-06-11