Affiliation:
1. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology Cambridge MA 02139 USA
2. Department of Materials Science and Engineering University of Illinois Urbana‐Champaign Urbana IL 61801 USA
Funder
Taiwan Semiconductor Manufacturing Company
National Science Foundation
Materials Research Science and Engineering Center, Harvard University
Air Force Office of Scientific Research
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Cited by
49 articles.
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