1. Department of Mechanical Engineering; Solid Mechanics; Technical University of Denmark; 2800 Kongens Lyngby Denmark
2. Department of Electrical Engineering; Centre for Acoustic-Mechanical Micro Systems; Technical University of Denmark; 2800 Kongens Lyngby Denmark
3. School of Engineering and Applied Sciences; Wyss Institute for Biologically Inspired Engineering; Harvard University; Cambridge MA 02138 USA