Interface characterization of nitrogen plasma-treated gate oxide film formed by RTP technology
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Published:2015-02-13
Issue:4
Volume:47
Page:555-555
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ISSN:0142-2421
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Container-title:Surface and Interface Analysis
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language:en
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Short-container-title:Surf. Interface Anal.
Author:
Choi Jae-Sung,Park Jea-Gun
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry