Simulations and measurements in scanning electron microscopes at low electron energy
Author:
Affiliation:
1. Department of ElectronicsUniversity of YorkHeslingtonYorkUnited Kingdom
2. Institute of Scientific InstrumentsBrnoCzech Republic
Funder
EC
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/sca.21330
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