Kinetics study of orientation-dependent surface blistering and exfoliation process in hydrogen-implanted germanium-Reference-Cited by-同舟云学术

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Kinetics study of orientation-dependent surface blistering and exfoliation process in hydrogen-implanted germanium

Published:2014-06-16 Issue:12-13 Volume:46 Page:1226-1230
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Chien C. C.¹,Chao D. S.²,Liang J. H.¹³

Affiliation:

1. Department of Engineering and System Science; National Tsing Hua University; Hsinchu 300 Taiwan

2. Nuclear Science and Technology Development Center; National Tsing Hua University; Hsinchu 300 Taiwan

3. Institute of Nuclear Engineering and Science; National Tsing Hua University; Hsinchu 300 Taiwan

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sia.5602/fullpdf

Reference15 articles.

1. Silicon-on-insulator: materials aspects and applications

2. R. Yu K. Y. Byun I. Ferain D. Angot R. Morrison C. Colinge Proceedings of the 2010 IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), Shanghai, China 2010 953

3. Basic mechanisms involved in the Smart-Cut® process

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