Special raster scanning for reduction of charging effects in scanning electron microscopy
Author:
Affiliation:
1. Faculty of Informatics; Department of Information Design; Kogakuin University; Tokyo Japan
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.21112/fullpdf
Reference13 articles.
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3. An improved scanning method based on characteristics of the human visual system for scanning electron microscopy;Oho;Scanning,2005
4. Quality improvement of environmental secondary electron detector signal using helium gas in variable pressure scanning electron microscopy;Oho;Scanning,2007
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