Affiliation:
1. VACOM Vakuum Komponenten & Messtechnik GmbH In den Brückenäckern 3; 07751 Groẞlöbichau
Subject
Surfaces, Coatings and Films,Condensed Matter Physics
Reference4 articles.
1. ISO/DIS 3556-1.2 1992 Sputter-ion pumps - Measurement of performance characteristics
2. DIN 28429:2014-05 Vakuumtechnik - Abnahmeregeln für Ionengetterpumpen
3. In situ observation of a cathode surface contamination of a sputter ion pump by Auger electron spectroscopy;Yagi;Journal of Vacuum Science and Technology,1981