Plasma jet cleaning of optics
Author:
Affiliation:
1. Technische Hochschule Wildau; Hochschulring 1 15745 Wildau
Publisher
Wiley
Subject
Surfaces, Coatings and Films,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/vipr.201800684/fullpdf
Reference16 articles.
1. Ultraviolet/ozone cleaning of carbon-contaminated optics
2. Cleaning of optical surfaces with photogenerated reactants
3. Plasma discharge cleaning of replica gratings contaminated by synchrotron radiation
4. Cleaning of contaminated XUV-optics at BESSY II
5. Cleaning properties of atomic oxygen excited to metastable state2s22p4(S10)
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