Investigation of the solvent-evaporation effect on spin coating of thin films-Reference-Cited by-同舟云学术

Investigation of the solvent-evaporation effect on spin coating of thin films

Published:1983-05 Issue:7 Volume:23 Page:399-403
ISSN:0032-3888
Container-title:Polymer Engineering and Science
language:en
Short-container-title:Polym. Eng. Sci.

Author:

Chen B. T.

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,General Chemistry,Materials Chemistry,Polymers and Plastics,General Chemistry

Reference6 articles.

1. and ?Handbook of Chemistry Rev.,? 10th Ed., Handbook Publishers Inc., Sandusky, Ol (1967).

2. ?Handbook of Chemistry and Physics,? 61st Ed., CRC Pro Inc., Boca Raton, Florida (1980-1981).

3. ?The Effect of Whirler Acceleration on the Properties of the Photoresist Film,? Proceedings of the S ond Kodak Seminar on Microminiaturization, April 1966.

4. Characteristics of resist films produced by spinning

5. Rheology and Modeling of the Spin Coating Process

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