Epoxy resins for deep UV lithography
Author:
Publisher
Wiley
Subject
Materials Chemistry,Polymers and Plastics,General Chemistry,Materials Chemistry,Polymers and Plastics,General Chemistry
Reference18 articles.
1. ACS Symposium;Crivello,1984
2. ACS Symposium;Ito
3. Diaryliodonium Salts. A New Class of Photoinitiators for Cationic Polymerization
4. Photoinitiated cationic polymerization with triarylsulfonium salts
5. Photoinitiated cationic polymerization by dialkylphenacylsulfonium salts
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2. Synthesis of a photo-patternable cross-linked epoxy system containing photodegradable carbonate units for deep UV lithography;Journal of Applied Polymer Science;2009-11-15
3. Aqueous base developable deep-UV resist based on chemically amplified crosslinking of phenolic resin;Polymer Engineering and Science;1992-10
4. Photophysical and photochemical studies of phenothiazine and some derivatives: exploratory studies of novel photosensitizers for photoresist technology;Chemistry of Materials;1991-07-01
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