ChemInform Abstract: Thin Film Deposition Techniques (PVD)
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Published:2010-05-23
Issue:49
Volume:32
Page:no-no
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ISSN:0931-7597
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Container-title:ChemInform
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language:en
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Short-container-title:ChemInform
Reference1 articles.
1. Thin Film Deposition Techniques (PVD);Steinbeiss;Lect. Notes Phys.,2001