Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products
Author:
Affiliation:
1. Dr. N. V. Toan, Dr. M. Toda, Dr. T. Hokama, Dr. T. Ono; Graduate School of Engineering; Tohoku University; Sendai 980-8579 Japan
Funder
Ministry of Education, Culture, Sports, Science and Technology
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Reference25 articles.
1. A platform for monolithic CMOS-MEMS integration on SOI wafers
2. Heterogeneous integration by adhesive bonding
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4. http://www.maintenancetechnology.com/2013/09/moisture-protection-of-electronics/
5. H. Conseil M. S. Jellesen R. Ambat 2014 10.1109/EPTC.2014.7028356
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