Unconventional Use of a Photoresist as a Nitrogen Gas Generator Forming Transparent Dome-Shaped Microcavities
Author:
Affiliation:
1. Department of Electrical Engineering; Korea Advanced Institute of Science and Technology (KAIST); 291 Daehak-ro, Yuseong-gu Daejeon 34141 Republic of Korea
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/adem.201500508/fullpdf
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5. J. Jin S. Di P. Liu G. Tang X. Chen R. Du Proc. of Int. Conf. Manipulation, Manuf. Meas. Nanoscale 2014
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