Amorphous Silicon Self‐Rolling Micro Electromechanical Systems: From Residual Stress Control to Complex 3D Structures-Reference-Cited by-同舟云学术

Amorphous Silicon Self‐Rolling Micro Electromechanical Systems: From Residual Stress Control to Complex 3D Structures

Published:2019-08-08 Issue:9 Volume:21 Page:1900663
ISSN:1438-1656
Container-title:Advanced Engineering Materials
language:en
Short-container-title:Adv. Eng. Mater.

Author:

Pinto Rui M. R.¹,Chu Virginia¹^ORCID,Conde João Pedro¹²

Affiliation:

1. Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias (INESC MN) and IN – Institute of Nanoscience and Nanotechnology Rua Alves Redol, 9 1000-029 Lisboa Portugal

2. Department of BioengineeringInstituto Superior TécnicoUniversity of Lisbon Av. Rovisco Pais, 1 1049-001 Lisboa Portugal

Funder

Fundação para a Ciência e a Tecnologia

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.201900663

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