Local nano‐electrode fabrication utilizing nanofluidic and nano‐electrochemical control

Abstract

AbstractMiniaturized systems have attracted much attention with the recent advances in microfluidics and nanofluidics. From the capillary electrophoresis, the development of glass‐based microfluidic and nanofluidic technologies has supported advances in microfluidics and nanofluidics. Most microfluidic systems, especially nanofluidic systems, are still simple, such as systems constructed with simple straight nanochannels and bulk‐scale electrodes. One of the bottlenecks to the development of more complicated and sophisticated systems is to develop the locally integrated nano‐electrodes. However, there are still issues with integrating nano‐electrodes into nanofluidic devices because it is difficult to fit the nano‐electrode size into a nanofluidic channel at the nanometer level. In this study, we propose a new method for the fabrication of local nano‐electrodes in nanofluidic devices with nanofluidic and nano‐electrochemistry‐based experiments. An electroplating solution was introduced to a nanochannel with control of the flow and the electroplating reaction, by which nano‐electrodes were successfully fabricated. In addition, a nanofluidic device was available for nanofluidic experiments with the application of 200 kPa. This method can be applied to any electroplating material such as gold and copper. The local nano‐electrode will make a significant contribution to the development of more complicated and sophisticated nanofluidic electrophoresis systems and to local electric detection methods for various nanofluidic devices.